Fabrication process
Upgrade techniques, and transform techniques to products
Production process LithoXetchTM
MetaLenX proposes specific semicondutor process for metalens after a long time of optimization, based on which the mass producible metalenses are validated
Small lot production
MetaLenX uses e-beam lithography to optimize the performance before mass production and delivery to ensure reliability
Anti-reflection coating for metalens
MetaLenX proposes anti-reflection coating via several advanced techniques to greatly enhance the transimittance of broad band metalenses
Advanced metasurface fabrications
For special metasurface fabrication and bonding, MetaLenX has the corresponding methods, such as curve substrate lithography, wafer level bonding for metasurfaces, and stepped substrate lithography, etc.
